JPH0488034U - - Google Patents

Info

Publication number
JPH0488034U
JPH0488034U JP40332890U JP40332890U JPH0488034U JP H0488034 U JPH0488034 U JP H0488034U JP 40332890 U JP40332890 U JP 40332890U JP 40332890 U JP40332890 U JP 40332890U JP H0488034 U JPH0488034 U JP H0488034U
Authority
JP
Japan
Prior art keywords
vibration system
biasing
way clutch
roller
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP40332890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP40332890U priority Critical patent/JPH0488034U/ja
Publication of JPH0488034U publication Critical patent/JPH0488034U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP40332890U 1990-12-13 1990-12-13 Pending JPH0488034U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP40332890U JPH0488034U (en]) 1990-12-13 1990-12-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP40332890U JPH0488034U (en]) 1990-12-13 1990-12-13

Publications (1)

Publication Number Publication Date
JPH0488034U true JPH0488034U (en]) 1992-07-30

Family

ID=31881117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP40332890U Pending JPH0488034U (en]) 1990-12-13 1990-12-13

Country Status (1)

Country Link
JP (1) JPH0488034U (en])

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